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Interface Properties of TiO2 on Si Formed by Simultaneous Implantation and Deposition of Titanium and Oxygen Ions

W. Attenberger, G. Thorwarth, D. Manova, S. Maendl, B. Stritzker und B. Rauschenbach

erschienen 2001 Surf. Coat. Technol. 142/144, 412–417 (2001) [DOI Link]