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Influence of the nucleation process on the azimuthal misorientation of heteroepitaxial diamond films on Si(001)

M. Schreck, K.-H. Thürer, R. Klarmann und B. Stritzker

erschienen 1997 J. Appl. Phys. 81, 3096 (1997) http://dx.doi.org/10.1063/1.364343