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Characterization of the near-interface region of CVD-diamond films on silicon by Backscatter Kikuchi Diffraction

S. Geier, M. Schreck, R. Heßmer, B. Rauschenbach, B. Stritzker, K. Kunze und B. L. Adams

erschienen 1994 Appl. Phys. Lett. 65, 1781 (1994) [DOI Link]