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  • Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices
Dipl.-Phys. Jan Weber
Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices
Supervisor: Prof. Dr. Achim Wixforth
Date of oral examination: 05/16/2007
englisch