Suche

Jan Weber
Investigation of the Physical Properties, Performance and Application of MEMS Sensors Based on Bulk Acoustic Waves excited in Piezoelectric Thin Film Devices [original title]
Betreuer: Prof. Dr. Achim Wixforth [Experimentalphysik I]
Datum der mündlichen Prüfung: 16.05.2007
162 Seiten, englisch [Originalversion ]