Suche

06365


Master Advanced Functional Materials (FAME) Sommersemester 2012
06365 Ion-Solid-Interaction [V]
   
Dozent Stritzker B.
Dauer 4 SWS
Studiensemester 1
Schein Ja (Klausur; 6 LP)
Termin Mi, 10:00-11:30, 1003/T
Do, 17:30-19:00, 2003/T
Beginn 02.05.2012
Inhalt Contents 1 Introduction 1.1 Applications of Ion Solid Interactions

2 Fundamentals of atomic collision processes 2.1 Scattering by a central force field 2.2 Two-body scattering 2.3 Inelastic scattering 2.4 Limitations of the classical limit 2.5 Scattering cross section 2.5.1 Rutherford-Scattering Cross Section 2.6 Potentials in binary collision models 2.7 Inelastic energy loss: Ion stopping 2.7.1 Nuclear Stopping 2.7.2 Electronic Stopping 2.7.3 Derivation of the Bethe-Bloch-Formula 2.7.4 Tscherenkow-Radiation

3 Ion implantation 3.1 Ion implanter 3.2 Tandem accelerator 3.3 Plasma immersion ion implantation 3.4 Range distribution 3.4.1 Ion Channeling 3.5 Radiation damage

4 Ion Beam Analysis 4.1 RBS (Rutherford Backscattering) 4.2 Channeling 4.3 Nuclear Reaction Analysis 4.4 SIMS (Secondary Ion Mass Spectroscopy)

Begleitend 06366