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Thermal Stability of PIII Deposited Hard-Coatings with Compositions Between Diamond-Like Carbon and Amorphous Silicon-Carbonitride

Florian Schwarz, Claus Hammerl, Goetz Thorwarth, Marcus Kuhn und Bernd Stritzker

erschienen 2007 Plasma Process. Polym. 2007, 4, S254–S258 [DOI Link]