Suche

Quantitative analysis of thin film compositions using EFTEM combined with RBS and ERDA

JKN. Lindner, M. Haberlen, F. Schwarz, G. Thorwarth, C. Hammerl, W. Assmann und B. Stritzker

erschienen 2007 MICROELECTRONIC ENGINEERING 84 (3), 474–478 (2007) [DOI Link]