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Control of lithium-t-butoxide addition during chemical vapor deposition of Li-doped diamond films by optical emission spectroscopy

H. Sternschulte, M. Schreck, A. Bergmaier, G. Dollinger und B. Stritzker

erschienen 1999 Phys. stat. sol. (a) 174 , 65 (1999) [DOI Link]