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Stress distribution in thin heteroepitaxial diamond films on Ir/SrTiO3 studied by x-ray diffraction, Raman spectroscopy and finite element simulations

M. Schreck, H. Roll, J. Michler, E. Blank und B. Stritzker

erschienen 2000 J. Appl. Phys. 88, 2456 (2000) [DOI Link]