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High quality single atomic layer deposition of hexagonal boron nitride on single crystalline Rh(111) four-inch wafers

A. Hemmi, C. Bernard, H. Cun, S. Roth, M. Klockner, T. Kalin, M. Weinl, S. Gsell, M. Schreck, J. Osterwalder, T. Greber

Review Sci. Instrum. 85, 035101 (2014) [DOI Link]