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Incorporation of nitrogen into carbon films produced by PECVD under bias voltage

J. Hartmann, M. Schreck, T. Baur, H. Huber, W. Assmann, H. Schuler, B. Stritzker und B. Rauschenbach

erschienen 1998 Diamond Relat. Mater. 7, 899 (1998) [DOI Link]